{"id":1527,"date":"2026-10-30T19:24:28","date_gmt":"2026-10-30T11:24:28","guid":{"rendered":"https:\/\/www.science-laser.com\/?p=1527"},"modified":"2026-10-30T19:27:02","modified_gmt":"2026-10-30T11:27:02","slug":"%e4%b8%ba%e4%bb%80%e4%b9%88caf%e2%82%82%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e7%9a%84%e9%87%8f%e6%b5%8b%e4%b8%8e%e6%a3%80%e6%b5%8b%e7%8e%af%e8%8a%82%e4%b8%ad%e4%b8%8d%e5%8f%af","status":"publish","type":"post","link":"https:\/\/www.science-laser.com\/?p=1527","title":{"rendered":"\u4e3a\u4ec0\u4e48CaF\u2082\u5728\u534a\u5bfc\u4f53\u5236\u9020\u7684\u91cf\u6d4b\u4e0e\u68c0\u6d4b\u73af\u8282\u4e2d\u4e0d\u53ef\u6216\u7f3a"},"content":{"rendered":"\n

\u5f15\u8a00<\/h3>\n\n\n

\u5728\u534a\u5bfc\u4f53\u5236\u9020\u7684\u91cf\u6d4b\u4e0e\u68c0\u6d4b\u73af\u8282\uff0c\u5149\u6ce2\u957f\u6bcf\u7f29\u77ed\u4e00\u6b65\uff0c\u5bf9\u6750\u6599\u7684\u8003\u9a8c\u5c31\u4e25\u82db\u4e00\u5206\u3002\u5f53\u5de5\u4f5c\u6ce2\u957f\u8fdb\u5165 193nm \u6df1\u7d2b\u5916\u6ce2\u6bb5\uff0c\u7edd\u5927\u591a\u6570\u5e38\u89c4\u5149\u5b66\u73bb\u7483\u5df2\u7ecf\u65e0\u6cd5\u80dc\u4efb\uff0c\u6c1f\u5316\u9499\uff08CaF\u2082\uff09\u5355\u6676\u6210\u4e3a\u8fd9\u4e00\u6ce2\u6bb5\u5c11\u6570\u53ef\u9760\u7684\u9009\u62e9\u3002\u8fd1\u671f\uff0c\u6211\u4eec\u9762\u5411\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u9886\u57df\uff0c\u91cd\u70b9\u4f9b\u5e94\u5fb7\u56fd HELLMA \u54c1\u724c\u7684 CaF\u2082 \u6676\u4f53\u7247\u2014\u2014193nm \u5de5\u4f5c\u6ce2\u6bb5\u3001\u6fc0\u5149\u8010\u4e45\u5ea6 LD-A \u7ea7\uff0c\u7528\u4e8e\u7a97\u53e3\u7247\u3001\u900f\u955c\u53ca\u504f\u632f\u5149\u5b66\u5143\u4ef6\u7684\u5236\u9020\u3002\u672c\u6587\u56f4\u7ed5\u8fd9\u4e00\u4ea7\u54c1\u7684\u6750\u6599\u7279\u6027\u4e0e\u5e94\u7528\u4ef7\u503c\u505a\u4e00\u6b21\u68b3\u7406\u3002<\/p>\n

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\u4f46\u6ce2\u957f\u8d8a\u77ed\uff0c\u53ef\u7528\u7684\u900f\u5149\u6750\u6599\u8d8a\u5c11\u3002\u5e38\u89c4\u5149\u5b66\u73bb\u7483\u5728 193nm \u5904\u5438\u6536\u5267\u70c8\uff0c\u51e0\u4e4e\u5b8c\u5168\u4e0d\u53ef\u7528\uff1b\u5373\u4fbf\u662f\u6df1\u7d2b\u5916\u7ea7\u7194\u77f3\u82f1\uff0c\u5728\u957f\u65f6\u95f4\u5f3a\u7d2b\u5916\u8f90\u7167\u4e0b\u4e5f\u4f1a\u51fa\u73b0\u81f4\u5bc6\u5316\u4e0e\u8272\u5fc3\u6548\u5e94\uff0c\u5bfc\u81f4\u900f\u8fc7\u7387\u7f13\u6162\u8870\u51cf\u3001\u6ce2\u524d\u53d1\u751f\u7578\u53d8\uff0c\u76f4\u63a5\u5f71\u54cd\u91cf\u6d4b\u7ed3\u679c\u7684\u957f\u671f\u7a33\u5b9a\u6027\u3002<\/p>\n

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\u4e09\u3001\u5728\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u4e2d\u7684\u5178\u578b\u5e94\u7528<\/h2>\n

\u5149\u8c31\u692d\u504f\u4eea\u4e0e\u8584\u819c\u91cf\u6d4b\u3002<\/strong>\u692d\u504f\u4eea\u901a\u8fc7\u6d4b\u91cf\u504f\u632f\u5149\u7ecf\u8584\u819c\u53cd\u5c04\u540e\u7684\u504f\u632f\u6001\u53d8\u5316\uff0c\u53cd\u6f14\u51fa\u819c\u539a\u4e0e\u6298\u5c04\u7387\u3002193nm \u6ce2\u6bb5\u7684\u692d\u504f\u6d4b\u91cf\u80fd\u591f\u80dc\u4efb\u6570\u7eb3\u7c73\u751a\u81f3\u4e9a\u7eb3\u7c73\u7ea7\u8d85\u8584\u8584\u819c\u7684\u8868\u5f81\uff0c\u662f\u5148\u8fdb\u5236\u7a0b\u819c\u539a\u7ba1\u63a7\u7684\u91cd\u8981\u624b\u6bb5\u3002\u5728\u8fd9\u7c7b\u8bbe\u5907\u4e2d\uff0cCaF\u2082 \u6676\u4f53\u7247\u88ab\u7528\u4e8e\u5149\u6e90\u7a97\u53e3\u3001\u6837\u54c1\u5ba4\u7a97\u53e3\u4ee5\u53ca\u504f\u632f\u5149\u8def\u4e2d\u7684\u900f\u955c\u4e0e\u5143\u4ef6\u57fa\u6750\u2014\u2014\u5176\u4f4e\u53cc\u6298\u5c04\u7279\u6027\u5bf9\u504f\u632f\u6d4b\u91cf\u7cbe\u5ea6\u81f3\u5173\u91cd\u8981\uff0c\u4efb\u4f55\u5fae\u5c0f\u7684\u5e94\u529b\u53cc\u6298\u5c04\u90fd\u4f1a\u88ab\u504f\u632f\u68c0\u6d4b\u73af\u8282\u653e\u5927\u4e3a\u6d4b\u91cf\u8bef\u5dee\u3002<\/p>\n

\u6676\u5706\u7f3a\u9677\u68c0\u6d4b\u4e0e\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\u3002<\/strong>\u6df1\u7d2b\u5916\u7167\u660e\u914d\u5408\u9ad8\u5206\u8fa8\u7387\u6210\u50cf\u5149\u8def\uff0c\u662f\u6676\u5706\u8868\u9762\u9897\u7c92\u3001\u5212\u4f24\u4e0e\u5f62\u8c8c\u8d77\u4f0f\u68c0\u6d4b\u7684\u4e3b\u6d41\u6280\u672f\u8def\u7ebf\u4e4b\u4e00\u3002CaF\u2082 \u5236\u6210\u7684\u900f\u955c\u4e0e\u7a97\u53e3\u627f\u62c5\u7740\u5c06\u7d2b\u5916\u5149\u9ad8\u6548\u5bfc\u5165\u5149\u8def\u3001\u5e76\u4fdd\u6301\u6ce2\u524d\u8d28\u91cf\u7684\u4efb\u52a1\uff0c\u6750\u6599\u7684\u900f\u8fc7\u7387\u5747\u5300\u6027\u4e0e\u9762\u5f62\u7cbe\u5ea6\u76f4\u63a5\u51b3\u5b9a\u4e86\u68c0\u6d4b\u7075\u654f\u5ea6\u3002<\/p>\n

\u7d2b\u5916\u5149\u6e90\u7cfb\u7edf\u3002<\/strong>ArF \u51c6\u5206\u5b50\u6fc0\u5149\u5668\u53ca\u6df1\u7d2b\u5916\u7167\u660e\u7cfb\u7edf\u7684\u5185\u90e8\u7a97\u53e3\u3001\u8154\u4f53\u955c\u7247\u57fa\u6750\uff0c\u540c\u6837\u4f9d\u8d56 CaF\u2082 \u7684\u9ad8\u900f\u8fc7\u7387\u4e0e\u6fc0\u5149\u8010\u4e45\u6027\u3002LD-A \u7ea7\u6676\u4f53\u5728\u8fd9\u4e00\u573a\u666f\u4e0b\u8981\u7ecf\u53d7\u6570\u4ee5\u4ebf\u8ba1\u7684\u8109\u51b2\u8f90\u7167\uff0c\u662f\u5bf9\u6750\u6599\u54c1\u8d28\u6700\u76f4\u63a5\u7684\u8003\u9a8c\u3002<\/p>\n

\u56db\u3001\u9009\u578b\u4e0e\u91c7\u8d2d\u4e2d\u7684\u5173\u952e\u53c2\u6570<\/h2>\n

\u6839\u636e\u6211\u4eec\u670d\u52a1\u534a\u5bfc\u4f53\u91cf\u6d4b\u5ba2\u6237\u7684\u7ecf\u9a8c\uff0c\u91c7\u8d2d 193nm \u7528 CaF\u2082 \u6676\u4f53\u7247\u65f6\uff0c\u4ee5\u4e0b\u51e0\u9879\u53c2\u6570\u5efa\u8bae\u5728\u6280\u672f\u534f\u8bae\u4e2d\u9010\u9879\u660e\u786e\uff1a<\/p>\n

    \n
  • \u6fc0\u5149\u8010\u4e45\u5ea6\u7b49\u7ea7\uff1a<\/strong>\u660e\u786e\u6ce2\u957f\u3001\u80fd\u91cf\u5bc6\u5ea6\u4e0e\u8109\u51b2\u5bff\u547d\u7684\u6d4b\u8bd5\u6761\u4ef6\uff0c\u5e76\u786e\u8ba4\u7b49\u7ea7\u5224\u5b9a\u4f9d\u636e\uff0c\u907f\u514d\u201c\u8010\u4e45\u6027\u597d\u201d\u8fd9\u7c7b\u6a21\u7cca\u8868\u8ff0\u3002<\/li>\n
  • \u5e94\u529b\u53cc\u6298\u5c04\uff1a<\/strong>\u660e\u786e\u6d4b\u91cf\u65b9\u6cd5\u3001\u6d4b\u91cf\u6ce2\u957f\u4e0e\u901a\u5149\u5b54\u5f84\u53e3\u5f84\uff0c\u5efa\u8bae\u9010\u7247\u5b9e\u6d4b\u5e76\u968f\u7247\u4ea4\u4ed8\u6570\u636e\u3002<\/li>\n
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  • \u5c3a\u5bf8\u516c\u5dee\uff1a<\/strong>\u914d\u5408\u5c3a\u5bf8\u4e0e\u5149\u7a0b\u5c3a\u5bf8\u5e94\u5206\u522b\u5b9a\u4e49\u516c\u5dee\u65b9\u5411\u4e0e\u5e26\u5bbd\uff0c\u907f\u514d\u88c5\u914d\u5e72\u6d89\u4e0e\u5149\u7a0b\u504f\u5dee\u7684\u7d2f\u79ef\u3002<\/li>\n
  • \u8868\u9762\u8d28\u91cf\u4e0e\u5305\u88c5\uff1a<\/strong>\u6df1\u7d2b\u5916\u5143\u4ef6\u5bf9\u8868\u9762\u6c61\u67d3\u6781\u4e3a\u654f\u611f\uff0c\u6d01\u51c0\u52a0\u5de5\u73af\u5883\u4e0e\u65e0\u786b\u65e0\u5364\u6d01\u51c0\u5305\u88c5\u540c\u6837\u662f\u4ea4\u4ed8\u54c1\u8d28\u7684\u4e00\u90e8\u5206\u3002<\/li>\n<\/ul>\n

    \n\n","protected":false},"excerpt":{"rendered":"

    \u5f15\u8a00<\/p>\n","protected":false},"author":2,"featured_media":1531,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":true,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":true,"_geo_short_summary":"","_geo_structured_desc":"","_geo_faqs":"","_geo_key_points":"","_geo_target_audience":"","_geo_content_type":"","_geo_last_modified":"","_geo_version":0,"themepark_seo_title":"","themepark_seo_description":"","footnotes":""},"categories":[4],"tags":[],"class_list":["post-1527","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"metadata":{"themepark_auto_meta_ector0":["

    \u5728\u534a\u5bfc\u4f53\u5236\u9020\u7684\u91cf\u6d4b\u4e0e\u68c0\u6d4b\u73af\u8282\uff0c\u5149\u6ce2\u957f\u6bcf\u7f29\u77ed\u4e00\u6b65\uff0c\u5bf9\u6750\u6599\u7684\u8003\u9a8c\u5c31\u4e25\u82db\u4e00\u5206\u3002\u5f53\u5de5\u4f5c\u6ce2\u957f\u8fdb\u5165 193nm \u6df1\u7d2b\u5916\u6ce2\u6bb5\uff0c\u7edd\u5927\u591a\u6570\u5e38\u89c4\u5149\u5b66\u73bb\u7483\u5df2\u7ecf\u65e0\u6cd5\u80dc\u4efb\uff0c\u6c1f\u5316\u9499\uff08CaF\u2082\uff09\u5355\u6676\u6210\u4e3a\u8fd9\u4e00\u6ce2\u6bb5\u5c11\u6570\u53ef\u9760\u7684\u9009\u62e9\u3002\u8fd1\u671f\uff0c\u6211\u4eec\u9762\u5411\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u9886\u57df\uff0c\u91cd\u70b9\u4f9b\u5e94\u5fb7\u56fd HELLMA \u54c1\u724c\u7684 CaF\u2082 \u6676\u4f53\u7247\u2014\u2014193nm \u5de5\u4f5c\u6ce2\u6bb5\u3001\u6fc0\u5149\u8010\u4e45\u5ea6 LD-A \u7ea7\uff0c\u7528\u4e8e\u7a97\u53e3\u7247\u3001\u900f\u955c\u53ca\u504f\u632f\u5149\u5b66\u5143\u4ef6\u7684\u5236\u9020\u3002\u672c\u6587\u56f4\u7ed5\u8fd9\u4e00\u4ea7\u54c1\u7684\u6750\u6599\u7279\u6027\u4e0e\u5e94\u7528\u4ef7\u503c\u505a\u4e00\u6b21\u68b3\u7406\u3002<\/p>\r\n\r\n

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    \u4e8c\u3001LD-A \u7ea7\u6fc0\u5149\u8010\u4e45\u5ea6\u610f\u5473\u7740\u4ec0\u4e48<\/h2>\r\n

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      \r\n \t
    • \u6fc0\u5149\u8010\u4e45\u5ea6\u7b49\u7ea7\uff1a<\/strong>\u660e\u786e\u6ce2\u957f\u3001\u80fd\u91cf\u5bc6\u5ea6\u4e0e\u8109\u51b2\u5bff\u547d\u7684\u6d4b\u8bd5\u6761\u4ef6\uff0c\u5e76\u786e\u8ba4\u7b49\u7ea7\u5224\u5b9a\u4f9d\u636e\uff0c\u907f\u514d\u201c\u8010\u4e45\u6027\u597d\u201d\u8fd9\u7c7b\u6a21\u7cca\u8868\u8ff0\u3002<\/li>\r\n \t
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    • \u8868\u9762\u8d28\u91cf\u4e0e\u5305\u88c5\uff1a<\/strong>\u6df1\u7d2b\u5916\u5143\u4ef6\u5bf9\u8868\u9762\u6c61\u67d3\u6781\u4e3a\u654f\u611f\uff0c\u6d01\u51c0\u52a0\u5de5\u73af\u5883\u4e0e\u65e0\u786b\u65e0\u5364\u6d01\u51c0\u5305\u88c5\u540c\u6837\u662f\u4ea4\u4ed8\u54c1\u8d28\u7684\u4e00\u90e8\u5206\u3002<\/li>\r\n<\/ul>\r\n

      <\/p>"],"themepark_post_bcolor":["#f5f5f5"],"themepark_post_width":["1022px"],"themepark_post_img_po":["left"],"themepark_post_hide_title":["1"],"themepark_post_main_p":["100"],"themepark_paddingblock":["1"],"themepark_auto_metas":["a:1:{s:6:\"ector0\";s:6290:\"

      \u5728\u534a\u5bfc\u4f53\u5236\u9020\u7684\u91cf\u6d4b\u4e0e\u68c0\u6d4b\u73af\u8282\uff0c\u5149\u6ce2\u957f\u6bcf\u7f29\u77ed\u4e00\u6b65\uff0c\u5bf9\u6750\u6599\u7684\u8003\u9a8c\u5c31\u4e25\u82db\u4e00\u5206\u3002\u5f53\u5de5\u4f5c\u6ce2\u957f\u8fdb\u5165 193nm \u6df1\u7d2b\u5916\u6ce2\u6bb5\uff0c\u7edd\u5927\u591a\u6570\u5e38\u89c4\u5149\u5b66\u73bb\u7483\u5df2\u7ecf\u65e0\u6cd5\u80dc\u4efb\uff0c\u6c1f\u5316\u9499\uff08CaF\u2082\uff09\u5355\u6676\u6210\u4e3a\u8fd9\u4e00\u6ce2\u6bb5\u5c11\u6570\u53ef\u9760\u7684\u9009\u62e9\u3002\u8fd1\u671f\uff0c\u6211\u4eec\u9762\u5411\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u9886\u57df\uff0c\u91cd\u70b9\u4f9b\u5e94\u5fb7\u56fd HELLMA \u54c1\u724c\u7684 CaF\u2082 \u6676\u4f53\u7247\u2014\u2014193nm \u5de5\u4f5c\u6ce2\u6bb5\u3001\u6fc0\u5149\u8010\u4e45\u5ea6 LD-A \u7ea7\uff0c\u7528\u4e8e\u7a97\u53e3\u7247\u3001\u900f\u955c\u53ca\u504f\u632f\u5149\u5b66\u5143\u4ef6\u7684\u5236\u9020\u3002\u672c\u6587\u56f4\u7ed5\u8fd9\u4e00\u4ea7\u54c1\u7684\u6750\u6599\u7279\u6027\u4e0e\u5e94\u7528\u4ef7\u503c\u505a\u4e00\u6b21\u68b3\u7406\u3002<\/p>\r\n\r\n

      \u4e00\u3001\u4e3a\u4ec0\u4e48 193nm \u6ce2\u6bb5\u79bb\u4e0d\u5f00 CaF\u2082<\/h2>\r\n

      193nm \u662f ArF \u51c6\u5206\u5b50\u6fc0\u5149\u7684\u8f93\u51fa\u6ce2\u957f\uff0c\u4e5f\u662f\u6df1\u7d2b\u5916\u5149\u523b\u4e0e\u6df1\u7d2b\u5916\u91cf\u6d4b\u6280\u672f\u7684\u6838\u5fc3\u6ce2\u957f\u3002\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u8ffd\u6c42\u7684\uff0c\u662f\u5728\u66f4\u77ed\u6ce2\u957f\u4e0b\u83b7\u5f97\u66f4\u9ad8\u7684\u5206\u8fa8\u7387\u4e0e\u8584\u819c\u63a2\u6d4b\u7075\u654f\u5ea6\u2014\u2014\u6676\u5706\u8868\u9762\u5f62\u8c8c\u7684\u7eb3\u7c73\u7ea7\u8d77\u4f0f\u3001\u5916\u5ef6\u5c42\u4e0e\u4ecb\u8d28\u819c\u7684\u539a\u5ea6\u5dee\u5f02\u3001\u8d85\u8584\u8584\u819c\u7684\u6298\u5c04\u7387\u4e0e\u6210\u5206\u53d8\u5316\uff0c\u90fd\u9700\u8981\u5728\u6df1\u7d2b\u5916\u6ce2\u6bb5\u624d\u80fd\u88ab\u6709\u6548\u5206\u8fa8\u3002<\/p>\r\n

      \u4f46\u6ce2\u957f\u8d8a\u77ed\uff0c\u53ef\u7528\u7684\u900f\u5149\u6750\u6599\u8d8a\u5c11\u3002\u5e38\u89c4\u5149\u5b66\u73bb\u7483\u5728 193nm \u5904\u5438\u6536\u5267\u70c8\uff0c\u51e0\u4e4e\u5b8c\u5168\u4e0d\u53ef\u7528\uff1b\u5373\u4fbf\u662f\u6df1\u7d2b\u5916\u7ea7\u7194\u77f3\u82f1\uff0c\u5728\u957f\u65f6\u95f4\u5f3a\u7d2b\u5916\u8f90\u7167\u4e0b\u4e5f\u4f1a\u51fa\u73b0\u81f4\u5bc6\u5316\u4e0e\u8272\u5fc3\u6548\u5e94\uff0c\u5bfc\u81f4\u900f\u8fc7\u7387\u7f13\u6162\u8870\u51cf\u3001\u6ce2\u524d\u53d1\u751f\u7578\u53d8\uff0c\u76f4\u63a5\u5f71\u54cd\u91cf\u6d4b\u7ed3\u679c\u7684\u957f\u671f\u7a33\u5b9a\u6027\u3002<\/p>\r\n

      \u6c1f\u5316\u9499\u5355\u6676\u5219\u4e0d\u540c\u3002\u5b83\u5728 193nm \u6ce2\u6bb5\u5177\u6709\u6781\u9ad8\u7684\u900f\u8fc7\u7387\u548c\u6781\u4f4e\u7684\u5438\u6536\uff0c\u672c\u5f81\u53cc\u6298\u5c04\u63a5\u8fd1\u4e8e\u96f6\uff0c\u540c\u65f6\u5177\u5907\u826f\u597d\u7684\u6297\u6fc0\u5149\u8f90\u7167\u80fd\u529b\u3002\u8fd9\u4e09\u4e2a\u7279\u6027\u53e0\u52a0\uff0c\u4f7f CaF\u2082 \u6210\u4e3a 193nm \u6ce2\u6bb5\u7a97\u53e3\u7247\u3001\u900f\u955c\u3001\u504f\u632f\u5143\u4ef6\u7b49\u6838\u5fc3\u5149\u5b66\u4ef6\u7684\u9996\u9009\u6750\u6599\u2014\u2014\u5728\u6df1\u7d2b\u5916\u91cf\u6d4b\u8bbe\u5907\u91cc\uff0c\u5b83\u5f80\u5f80\u4e0d\u662f\u201c\u53ef\u9009\u9879\u201d\uff0c\u800c\u662f\u201c\u5fc5\u9009\u9879\u201d\u3002<\/p>\r\n\r\n

      \u4e8c\u3001LD-A \u7ea7\u6fc0\u5149\u8010\u4e45\u5ea6\u610f\u5473\u7740\u4ec0\u4e48<\/h2>\r\n

      \u5bf9\u5de5\u4f5c\u5728\u5f3a\u7d2b\u5916\u6fc0\u5149\u73af\u5883\u4e2d\u7684\u5149\u5b66\u5143\u4ef6\u6765\u8bf4\uff0c\u201c\u900f\u5f97\u8fc7\u201d\u53ea\u662f\u7b2c\u4e00\u6b65\uff0c\u201c\u8010\u5f97\u4f4f\u201d\u624d\u662f\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\u7684\u5173\u952e\u3002\u6fc0\u5149\u8010\u4e45\u5ea6\uff08Laser Durability\uff09\u8861\u91cf\u7684\u662f\u5149\u5b66\u5143\u4ef6\u5728\u7279\u5b9a\u6ce2\u957f\u3001\u7279\u5b9a\u80fd\u91cf\u5bc6\u5ea6\u7684\u6fc0\u5149\u957f\u65f6\u95f4\u8f90\u7167\u4e0b\uff0c\u62b5\u6297\u635f\u4f24\u4e0e\u6027\u80fd\u8870\u51cf\u7684\u80fd\u529b\u3002<\/p>\r\n

      LD-A \u662f\u5382\u5bb6\u6fc0\u5149\u8010\u4e45\u6027\u5206\u7ea7\u4f53\u7cfb\u4e2d\u7684\u9ad8\u7b49\u7ea7\uff0c\u4e13\u95e8\u9762\u5411\u9ad8\u80fd\u91cf\u5bc6\u5ea6\u3001\u957f\u8109\u51b2\u5bff\u547d\u7684\u6df1\u7d2b\u5916\u5e94\u7528\u573a\u666f\u3002\u8981\u8fbe\u5230\u8fd9\u4e00\u7b49\u7ea7\uff0c\u6676\u4f53\u9700\u8981\u6ee1\u8db3\u4e00\u7cfb\u5217\u82db\u523b\u7684\u5185\u90e8\u54c1\u8d28\u6761\u4ef6\uff1a\u6781\u4f4e\u7684\u5305\u88f9\u4f53\u4e0e\u6c14\u6ce1\u5bc6\u5ea6\u3001\u53ef\u63a7\u7684\u4f4d\u9519\u5206\u5e03\u3001\u5145\u5206\u7684\u9000\u706b\u4ee5\u6d88\u9664\u6b8b\u4f59\u5e94\u529b\u3002\u8fd9\u4e9b\u6761\u4ef6\u76f4\u63a5\u51b3\u5b9a\u4e86\u5143\u4ef6\u5728\u957f\u671f\u8f90\u7167\u540e\u662f\u5426\u4f1a\u51fa\u73b0\u635f\u4f24\u70b9\u3001\u900f\u8fc7\u7387\u8870\u51cf\u6216\u53cc\u6298\u5c04\u52a3\u5316\u3002<\/p>\r\n

      \u5bf9\u8bbe\u5907\u5382\u5546\u800c\u8a00\uff0c\u9009\u7528 LD-A \u7ea7 CaF\u2082 \u6676\u4f53\u7247\uff0c\u610f\u5473\u7740\u91cf\u6d4b\u8bbe\u5907\u4e2d\u7684\u6838\u5fc3\u7d2b\u5916\u5149\u5b66\u4ef6\u53ef\u4ee5\u5728\u6574\u4e2a\u8bbe\u5907\u751f\u547d\u5468\u671f\u5185\u4fdd\u6301\u7a33\u5b9a\u7684\u5149\u5b66\u6027\u80fd\uff0c\u51cf\u5c11\u505c\u673a\u66f4\u6362\u4e0e\u91cd\u65b0\u6807\u5b9a\u7684\u9891\u6b21\u2014\u2014\u8fd9\u4e00\u70b9\uff0c\u5bf9\u4e8e\u4ea4\u4ed8\u7ed9\u4ea7\u7ebf\u540e\u9700\u8981 7\u00d724 \u5c0f\u65f6\u8fde\u7eed\u8fd0\u884c\u7684\u91cf\u6d4b\u8bbe\u5907\u6765\u8bf4\uff0c\u4ef7\u503c\u5c24\u4e3a\u76f4\u63a5\u3002<\/p>\r\n\r\n

      \u4e09\u3001\u5728\u534a\u5bfc\u4f53\u91cf\u6d4b\u8bbe\u5907\u4e2d\u7684\u5178\u578b\u5e94\u7528<\/h2>\r\n

      \u5149\u8c31\u692d\u504f\u4eea\u4e0e\u8584\u819c\u91cf\u6d4b\u3002<\/strong>\u692d\u504f\u4eea\u901a\u8fc7\u6d4b\u91cf\u504f\u632f\u5149\u7ecf\u8584\u819c\u53cd\u5c04\u540e\u7684\u504f\u632f\u6001\u53d8\u5316\uff0c\u53cd\u6f14\u51fa\u819c\u539a\u4e0e\u6298\u5c04\u7387\u3002193nm \u6ce2\u6bb5\u7684\u692d\u504f\u6d4b\u91cf\u80fd\u591f\u80dc\u4efb\u6570\u7eb3\u7c73\u751a\u81f3\u4e9a\u7eb3\u7c73\u7ea7\u8d85\u8584\u8584\u819c\u7684\u8868\u5f81\uff0c\u662f\u5148\u8fdb\u5236\u7a0b\u819c\u539a\u7ba1\u63a7\u7684\u91cd\u8981\u624b\u6bb5\u3002\u5728\u8fd9\u7c7b\u8bbe\u5907\u4e2d\uff0cCaF\u2082 \u6676\u4f53\u7247\u88ab\u7528\u4e8e\u5149\u6e90\u7a97\u53e3\u3001\u6837\u54c1\u5ba4\u7a97\u53e3\u4ee5\u53ca\u504f\u632f\u5149\u8def\u4e2d\u7684\u900f\u955c\u4e0e\u5143\u4ef6\u57fa\u6750\u2014\u2014\u5176\u4f4e\u53cc\u6298\u5c04\u7279\u6027\u5bf9\u504f\u632f\u6d4b\u91cf\u7cbe\u5ea6\u81f3\u5173\u91cd\u8981\uff0c\u4efb\u4f55\u5fae\u5c0f\u7684\u5e94\u529b\u53cc\u6298\u5c04\u90fd\u4f1a\u88ab\u504f\u632f\u68c0\u6d4b\u73af\u8282\u653e\u5927\u4e3a\u6d4b\u91cf\u8bef\u5dee\u3002<\/p>\r\n

      \u6676\u5706\u7f3a\u9677\u68c0\u6d4b\u4e0e\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\u3002<\/strong>\u6df1\u7d2b\u5916\u7167\u660e\u914d\u5408\u9ad8\u5206\u8fa8\u7387\u6210\u50cf\u5149\u8def\uff0c\u662f\u6676\u5706\u8868\u9762\u9897\u7c92\u3001\u5212\u4f24\u4e0e\u5f62\u8c8c\u8d77\u4f0f\u68c0\u6d4b\u7684\u4e3b\u6d41\u6280\u672f\u8def\u7ebf\u4e4b\u4e00\u3002CaF\u2082 \u5236\u6210\u7684\u900f\u955c\u4e0e\u7a97\u53e3\u627f\u62c5\u7740\u5c06\u7d2b\u5916\u5149\u9ad8\u6548\u5bfc\u5165\u5149\u8def\u3001\u5e76\u4fdd\u6301\u6ce2\u524d\u8d28\u91cf\u7684\u4efb\u52a1\uff0c\u6750\u6599\u7684\u900f\u8fc7\u7387\u5747\u5300\u6027\u4e0e\u9762\u5f62\u7cbe\u5ea6\u76f4\u63a5\u51b3\u5b9a\u4e86\u68c0\u6d4b\u7075\u654f\u5ea6\u3002<\/p>\r\n

      \u7d2b\u5916\u5149\u6e90\u7cfb\u7edf\u3002<\/strong>ArF \u51c6\u5206\u5b50\u6fc0\u5149\u5668\u53ca\u6df1\u7d2b\u5916\u7167\u660e\u7cfb\u7edf\u7684\u5185\u90e8\u7a97\u53e3\u3001\u8154\u4f53\u955c\u7247\u57fa\u6750\uff0c\u540c\u6837\u4f9d\u8d56 CaF\u2082 \u7684\u9ad8\u900f\u8fc7\u7387\u4e0e\u6fc0\u5149\u8010\u4e45\u6027\u3002LD-A \u7ea7\u6676\u4f53\u5728\u8fd9\u4e00\u573a\u666f\u4e0b\u8981\u7ecf\u53d7\u6570\u4ee5\u4ebf\u8ba1\u7684\u8109\u51b2\u8f90\u7167\uff0c\u662f\u5bf9\u6750\u6599\u54c1\u8d28\u6700\u76f4\u63a5\u7684\u8003\u9a8c\u3002<\/p>\r\n\r\n

      \u56db\u3001\u9009\u578b\u4e0e\u91c7\u8d2d\u4e2d\u7684\u5173\u952e\u53c2\u6570<\/h2>\r\n

      \u6839\u636e\u6211\u4eec\u670d\u52a1\u534a\u5bfc\u4f53\u91cf\u6d4b\u5ba2\u6237\u7684\u7ecf\u9a8c\uff0c\u91c7\u8d2d 193nm \u7528 CaF\u2082 \u6676\u4f53\u7247\u65f6\uff0c\u4ee5\u4e0b\u51e0\u9879\u53c2\u6570\u5efa\u8bae\u5728\u6280\u672f\u534f\u8bae\u4e2d\u9010\u9879\u660e\u786e\uff1a<\/p>\r\n\r\n

        \r\n \t
      • \u6fc0\u5149\u8010\u4e45\u5ea6\u7b49\u7ea7\uff1a<\/strong>\u660e\u786e\u6ce2\u957f\u3001\u80fd\u91cf\u5bc6\u5ea6\u4e0e\u8109\u51b2\u5bff\u547d\u7684\u6d4b\u8bd5\u6761\u4ef6\uff0c\u5e76\u786e\u8ba4\u7b49\u7ea7\u5224\u5b9a\u4f9d\u636e\uff0c\u907f\u514d\u201c\u8010\u4e45\u6027\u597d\u201d\u8fd9\u7c7b\u6a21\u7cca\u8868\u8ff0\u3002<\/li>\r\n \t
      • \u5e94\u529b\u53cc\u6298\u5c04\uff1a<\/strong>\u660e\u786e\u6d4b\u91cf\u65b9\u6cd5\u3001\u6d4b\u91cf\u6ce2\u957f\u4e0e\u901a\u5149\u5b54\u5f84\u53e3\u5f84\uff0c\u5efa\u8bae\u9010\u7247\u5b9e\u6d4b\u5e76\u968f\u7247\u4ea4\u4ed8\u6570\u636e\u3002<\/li>\r\n \t
      • \u6298\u5c04\u7387\u5747\u5300\u6027\uff1a<\/strong>\u91cf\u6d4b\u5e94\u7528\u5bf9\u6ce2\u524d\u4e00\u81f4\u6027\u654f\u611f\uff0c\u5747\u5300\u6027\u6307\u6807\u5e94\u4e0e\u6574\u673a\u5149\u8def\u8bbe\u8ba1\u8054\u52a8\u786e\u8ba4\u3002<\/li>\r\n \t
      • \u5c3a\u5bf8\u516c\u5dee\uff1a<\/strong>\u914d\u5408\u5c3a\u5bf8\u4e0e\u5149\u7a0b\u5c3a\u5bf8\u5e94\u5206\u522b\u5b9a\u4e49\u516c\u5dee\u65b9\u5411\u4e0e\u5e26\u5bbd\uff0c\u907f\u514d\u88c5\u914d\u5e72\u6d89\u4e0e\u5149\u7a0b\u504f\u5dee\u7684\u7d2f\u79ef\u3002<\/li>\r\n \t
      • \u8868\u9762\u8d28\u91cf\u4e0e\u5305\u88c5\uff1a<\/strong>\u6df1\u7d2b\u5916\u5143\u4ef6\u5bf9\u8868\u9762\u6c61\u67d3\u6781\u4e3a\u654f\u611f\uff0c\u6d01\u51c0\u52a0\u5de5\u73af\u5883\u4e0e\u65e0\u786b\u65e0\u5364\u6d01\u51c0\u5305\u88c5\u540c\u6837\u662f\u4ea4\u4ed8\u54c1\u8d28\u7684\u4e00\u90e8\u5206\u3002<\/li>\r\n<\/ul>\r\n

        <\/p>\";}"],"_thumbnail_id":["1531"],"_autoid":["1"],"_blocktemname":["\u65b0\u95fb\u8be6\u60c5\u9875\u53d1\u5e03\u6a21\u677f"],"views":["8"]},"medium_url":"https:\/\/www.science-laser.com\/wp-content\/uploads\/2026\/10\/CAF22-300x248.png","thumbnail_url":"https:\/\/www.science-laser.com\/wp-content\/uploads\/2026\/10\/CAF22-150x150.png","full_url":"https:\/\/www.science-laser.com\/wp-content\/uploads\/2026\/10\/CAF22.png","_links":{"self":[{"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/posts\/1527","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1527"}],"version-history":[{"count":1,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/posts\/1527\/revisions"}],"predecessor-version":[{"id":1528,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/posts\/1527\/revisions\/1528"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=\/wp\/v2\/media\/1531"}],"wp:attachment":[{"href":"https:\/\/www.science-laser.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1527"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1527"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.science-laser.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1527"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}