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\u53c2\u6570\u9879<\/th>\n\u5ba2\u6237\u521d\u59cb\u8868\u8ff0<\/th>\n\u6f84\u6e05\u540e\u7684\u6280\u672f\u8981\u6c42<\/th>\n<\/tr>\n<\/thead>\n
\u5916\u5f62\u5c3a\u5bf8<\/td>\n\u6309\u56fe\u7eb8\uff0c\u6b63\u516c\u5dee<\/td>\n\u03c625.4mm\uff0c\u5916\u5f84 +0.00\/+0.03mm\uff1b\u539a\u5ea6\u7531\u6b63\u516c\u5dee\u8c03\u6574\u4e3a 3.00\u00b10.02mm<\/td>\n<\/tr>\n
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\u6fc0\u5149\u8010\u4e45\u6027<\/td>\n\u300c\u8981\u597d\u300d<\/td>\n\u5bf9\u5e94\u5382\u5bb6 LD-A \u7b49\u7ea7\uff1a193nm\u3001200 mJ\/cm\u00b2\u300110\u2076 \u8109\u51b2\u8f90\u7167\u65e0\u635f\u4f24<\/td>\n<\/tr>\n
\u5e94\u529b\u53cc\u6298\u5c04<\/td>\n<5 nm\/cm<\/td>\n\u6709\u6548\u901a\u5149\u5b54\u5f84 \u03c620mm \u5185\u6700\u5927\u5ef6\u8fdf\u91cf \u22642 nm\/cm\uff0c\u9010\u7247\u5b9e\u6d4b\u3001\u968f\u7247\u4ea4\u4ed8<\/td>\n<\/tr>\n
<\/td>\n<\/td>\n<\/td>\n<\/tr>\n
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\u7ed3\u679c\uff1a<\/strong>\u5206\u6279\u65b9\u6848\u8ba9\u5ba2\u6237\u7684\u88c5\u914d\u8ba1\u5212\u6ca1\u6709\u505c\u6446\uff0c\u4e5f\u8ba9\u5382\u5bb6\u4e0d\u5fc5\u4e3a\u8d76\u5de5\u727a\u7272\u9000\u706b\u65f6\u95f4\u2014\u2014\u8fd9\u662f\u6574\u4e2a\u9879\u76ee\u91cc\uff0c\u552f\u4e00\u4e00\u4e2a\u8ba9\u4e09\u65b9\u90fd\u4e0d\u5403\u4e8f\u7684\u89e3\u3002<\/p>\n

\u56db\u3001\u4ea4\u4ed8\u8282\u594f\uff1a\u5341\u5468\uff0c\u56db\u4e2a\u8282\u70b9<\/h2>\n

\u7b2c 0 \u5468\uff0c\u9700\u6c42\u6f84\u6e05\uff1a\u56fe\u7eb8\u8bc4\u5ba1\uff0c\u8f93\u51fa 11 \u9879\u5f85\u786e\u8ba4\u53c2\u6570\u4e0e\u516c\u5dee\u51b2\u7a81\u6e05\u5355\uff1b\u7b2c 1\u20132 \u5468\uff0c\u56fe\u7eb8\u4f1a\u7b7e\uff1a\u4e24\u7248\u56fe\u7eb8\u6539\u7248\uff0c\u516c\u5dee\u5206\u914d\u4e0e\u6d4b\u91cf\u53e3\u5f84\u5199\u5165\u6280\u672f\u534f\u8bae\uff1b\u7b2c 3\u20138 \u5468\uff0c\u751f\u957f\u4e0e\u52a0\u5de5\uff1a\u4e13\u7528\u6279\u6b21\u751f\u957f\u3001\u957f\u65f6\u9000\u706b\u3001\u5207\u5272\u7814\u78e8\u629b\u5149\u3001193nm \u9540\u819c\uff1b\u7b2c 9\u201310 \u5468\uff0c\u68c0\u6d4b\u4e0e\u4ea4\u4ed8\uff1a\u9010\u7247\u53cc\u6298\u5c04\u4e0e\u9762\u5f62\u590d\u6d4b\uff0c\u6fc0\u5149\u8f90\u7167\u62bd\u68c0\uff0c\u6d01\u51c0\u5305\u88c5\u53d1\u8fd0\u3002<\/p>\n

\u8fd9\u5341\u5468\u91cc\uff0c\u6211\u4eec\u4e0e\u5ba2\u6237\u5b8c\u6210\u4e86\u4e94\u8f6e\u6280\u672f\u6f84\u6e05\u3001\u4e24\u6b21\u56fe\u7eb8\u6539\u7248\uff1b\u4e0e\u5382\u5bb6\u5f80\u8fd4\u5341\u4f59\u8f6e\u6280\u672f\u90ae\u4ef6\uff0c\u5e76\u7ec4\u7ec7\u4e86\u4e09\u6b21\u4e09\u65b9\u89c6\u9891\u4f1a\u8bae\u3002\u5bc6\u5ea6\u6700\u9ad8\u7684\u4e00\u5468\uff0c\u540c\u4e00\u4efd\u516c\u5dee\u8868\u5728\u5ba2\u6237\u5149\u673a\u3001\u5ba2\u6237\u91c7\u8d2d\u3001\u5382\u5bb6\u5de5\u827a\u4e09\u65b9\u4e4b\u95f4\u6765\u56de\u4fee\u6539\u4e86\u56db\u7248\u3002\u6c9f\u901a\u7684\u6210\u672c\uff0c\u6c38\u8fdc\u4f4e\u4e8e\u8fd4\u5de5\u7684\u6210\u672c<\/strong>\u2014\u2014\u8fd9\u53e5\u8bdd\u5728\u8fd9\u4e2a\u9879\u76ee\u91cc\u5f97\u5230\u4e86\u5b8c\u6574\u7684\u9a8c\u8bc1\u3002<\/p>\n

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\u5341\u5468\u540e\uff0c\u5341\u4e8c\u7247\u6676\u4f53\u7247\u5b8c\u6210\u4ea4\u4ed8\u3002\u968f\u8d27\u63d0\u4ea4\u7684\u4e0d\u662f\u4e00\u5f20\u5408\u683c\u8bc1\uff0c\u800c\u662f\u4e00\u5957\u9010\u7247\u7684\u68c0\u6d4b\u6570\u636e\u5305\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n\n\n
\u68c0\u6d4b\u9879<\/th>\n\u5b9e\u6d4b\u7ed3\u679c<\/th>\n<\/tr>\n<\/thead>\n
\u5916\u5f62\u5c3a\u5bf8<\/td>\n\u5916\u5f84 \u03c625.4 +0.012\uff5e+0.026mm\uff1b\u539a\u5ea6 3.00\u00b10.008mm\uff0c\u5168\u90e8\u843d\u5728\u6536\u7d27\u540e\u7684\u516c\u5dee\u5e26\u5185<\/td>\n<\/tr>\n
193nm \u900f\u8fc7\u7387<\/td>\n\u5185\u90e8\u900f\u8fc7\u7387 \u226599.6%\/cm\uff1b\u9540\u819c\u540e\u5355\u9762\u5269\u4f59\u53cd\u5c04\u7387 \u22640.4%<\/td>\n<\/tr>\n
\u5e94\u529b\u53cc\u6298\u5c04<\/td>\n\u03c620mm \u901a\u5149\u533a\u6700\u5927\u5ef6\u8fdf\u91cf \u22641.6 nm\/cm<\/td>\n<\/tr>\n
\u6298\u5c04\u7387\u5747\u5300\u6027<\/td>\n\u0394n \u22640.8\u00d710\u207b\u2076<\/td>\n<\/tr>\n
\u9762\u5f62\u4e0e\u8868\u9762<\/td>\nPV \u2264\u03bb\/12\uff0c\u4e0d\u89c4\u5219\u5ea6 \u2264\u03bb\/25 @633nm\uff1b\u8868\u9762\u8d28\u91cf 10-5\uff1bRq \u22644 \u00c5<\/td>\n<\/tr>\n
\u6fc0\u5149\u8010\u4e45\u6027<\/td>\n193nm ArF \u6fc0\u5149 200 mJ\/cm\u00b2\u300110\u2076 \u8109\u51b2\uff0c\u65e0\u635f\u4f24\u3001\u65e0\u900f\u8fc7\u7387\u8870\u51cf<\/td>\n<\/tr>\n
\u8fb9\u7f18\u4e0e\u5305\u88c5<\/td>\n\u5168\u7247\u5d29\u8fb9 \u22640.03mm\uff1bClass 100 \u73af\u5883\u53cc\u5c42\u771f\u7a7a\u6d01\u51c0\u5305\u88c5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u8868 2\u3000\u4ea4\u4ed8\u6279\u6b21\u5b9e\u6d4b\u6570\u636e\uff08\u8282\u9009\uff0c\u5df2\u83b7\u5ba2\u6237\u540c\u610f\u5f15\u7528\uff09\u3002<\/p>\n

\n\n","protected":false},"excerpt":{"rendered":"

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\u5916\u5f62\u5c3a\u5bf8<\/td>\r\n\u6309\u56fe\u7eb8\uff0c\u6b63\u516c\u5dee<\/td>\r\n\u03c625.4mm\uff0c\u5916\u5f84 +0.00\/+0.03mm\uff1b\u539a\u5ea6\u7531\u6b63\u516c\u5dee\u8c03\u6574\u4e3a 3.00\u00b10.02mm<\/td>\r\n<\/tr>\r\n
\u6750\u6599\u4e0e\u6ce2\u6bb5<\/td>\r\n193nm \u7528 CaF\u2082<\/td>\r\n193nm \u5149\u523b\u7ea7\u5355\u6676\u6c1f\u5316\u9499\uff0c\u5185\u90e8\u900f\u8fc7\u7387 \u226599.5%\/cm<\/td>\r\n<\/tr>\r\n
\u6fc0\u5149\u8010\u4e45\u6027<\/td>\r\n\u300c\u8981\u597d\u300d<\/td>\r\n\u5bf9\u5e94\u5382\u5bb6 LD-A \u7b49\u7ea7\uff1a193nm\u3001200 mJ\/cm\u00b2\u300110\u2076 \u8109\u51b2\u8f90\u7167\u65e0\u635f\u4f24<\/td>\r\n<\/tr>\r\n
\u5e94\u529b\u53cc\u6298\u5c04<\/td>\r\n<5 nm\/cm<\/td>\r\n\u6709\u6548\u901a\u5149\u5b54\u5f84 \u03c620mm \u5185\u6700\u5927\u5ef6\u8fdf\u91cf \u22642 nm\/cm\uff0c\u9010\u7247\u5b9e\u6d4b\u3001\u968f\u7247\u4ea4\u4ed8<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n

\u8fd9\u91cc\u6709\u4e00\u4e2a\u5bb9\u6613\u88ab\u5ffd\u7565\u7684\u7ec6\u8282\uff1a\u5ba2\u6237\u8bf4\u300c\u6b63\u516c\u5dee\u300d\uff0c\u8bf4\u7684\u662f\u88c5\u914d\u610f\u56fe\uff0c\u4e0d\u662f\u516c\u5dee\u672c\u8eab\u3002\u6df1\u7d2b\u5916\u5149\u8def\u91cc\uff0c\u6676\u4f53\u7247\u8981\u538b\u5165\u955c\u5ea7\u5b9a\u4f4d\uff0c\u5916\u5f84\u504f\u5c0f\u4f1a\u677e\u52a8\uff0c\u51e0\u5341\u5fae\u7c73\u7684\u4f4d\u79fb\u5c31\u8db3\u4ee5\u9020\u6210\u504f\u5fc3\u4e0e\u50cf\u8d28\u4e0b\u964d\u3002\u6240\u4ee5\u300c\u6b63\u516c\u5dee\u300d\u8fd9\u56db\u4e2a\u5b57\u80cc\u540e\uff0c\u5176\u5b9e\u662f\u4e00\u6761\u5b8c\u6574\u7684\u88c5\u914d\u94fe\u7ea6\u675f\u3002<\/p>\r\n\r\n

\u4e09\u3001\u4e09\u91cd\u6311\u6218\uff1a\u771f\u6b63\u7684\u56f0\u96be\u90fd\u4e0d\u5728\u56fe\u7eb8\u4e0a<\/h2>\r\n

\u6311\u6218\u4e00\uff1a\u6b63\u516c\u5dee\u7684\u8fb9\u754c\u5728\u54ea\u91cc<\/h3>\r\n

\u542c\u5230\u300c\u6240\u6709\u5c3a\u5bf8\u90fd\u8981\u6b63\u516c\u5dee\u300d\u65f6\uff0c\u6211\u4eec\u505a\u7684\u7b2c\u4e00\u4ef6\u4e8b\u4e0d\u662f\u8bb0\u5f55\uff0c\u800c\u662f\u8ffd\u95ee\uff1a\u539a\u5ea6\u4e5f\u8981\u6b63\u516c\u5dee\u5417\uff1f\u7b54\u6848\u662f\u4e0d\u80fd\u3002\u5982\u679c\u539a\u5ea6\u540c\u6837\u8d70\u5355\u5411\u6b63\u516c\u5dee\uff0c\u591a\u7247\u53e0\u52a0\u540e\u5149\u7a0b\u4f1a\u6574\u4f53\u504f\u79fb\uff0c\u692d\u504f\u4eea\u7684\u7126\u9762\u4e0e\u53c2\u8003\u81c2\u90fd\u9700\u91cd\u65b0\u6807\u5b9a\uff1b\u66f4\u9ebb\u70e6\u7684\u662f\uff0c\u539a\u5ea6\u504f\u5dee\u4f1a\u968f\u6279\u6b21\u6f02\u79fb\uff0c\u5ba2\u6237\u6bcf\u6b21\u6362\u7247\u90fd\u8981\u91cd\u65b0\u6821\u51c6\u3002\u6211\u4eec\u5411\u5ba2\u6237\u63d0\u4ea4\u4e86\u4e00\u4efd\u516c\u5dee\u5206\u914d\u5efa\u8bae\uff1a\u5916\u5f84\u3001\u5b9a\u4f4d\u53f0\u9636\u7b49\u914d\u5408\u5c3a\u5bf8\u4fdd\u7559\u5355\u5411\u6b63\u516c\u5dee\uff1b\u539a\u5ea6\u6539\u4e3a\u5bf9\u79f0\u516c\u5dee\u5e76\u6536\u7d27\u81f3 \u00b10.02mm\uff1b\u5269\u4f59\u504f\u5dee\u7531\u88c5\u914d\u7aef\u7684\u8c03\u8282\u57ab\u5708\u5438\u6536\u3002<\/strong><\/p>\r\n

\u7ed3\u679c\uff1a<\/strong>\u5ba2\u6237\u5149\u673a\u5de5\u7a0b\u5e08\u590d\u6838\u540e\u63a5\u53d7\u4e86\u8fd9\u4e00\u65b9\u6848\u3002\u8fd9\u662f\u9879\u76ee\u91cc\u7b2c\u4e00\u6b21\u300c\u6539\u9700\u6c42\u300d\uff0c\u4e5f\u662f\u6700\u5173\u952e\u7684\u4e00\u6b21\u2014\u2014\u5b83\u628a\u4e00\u4efd\u53ef\u80fd\u53cd\u590d\u8fd4\u5de5\u7684\u8ba2\u5355\uff0c\u53d8\u6210\u4e86\u4e00\u6b21\u53ef\u9884\u6d4b\u7684\u4ea4\u4ed8\u3002<\/p>\r\n\r\n

\u6311\u6218\u4e8c\uff1a\u5e94\u529b\u53cc\u6298\u5c04\uff0c\u6d4b\u5f97\u51fa\u6765\u624d\u7b97\u6570<\/h3>\r\n

CaF\u2082 \u7684\u672c\u5f81\u53cc\u6298\u5c04\u6781\u4f4e\uff0c\u5b9e\u9645\u6d4b\u5230\u7684\u53cc\u6298\u5c04\u51e0\u4e4e\u5168\u90e8\u6765\u81ea\u6b8b\u4f59\u5e94\u529b\uff1a\u6676\u4f53\u751f\u957f\u65f6\u7684\u70ed\u5e94\u529b\u3001\u5207\u5272\u4e0e\u7814\u78e8\u5f15\u5165\u7684\u673a\u68b0\u5e94\u529b\u3001\u9540\u819c\u8fc7\u7a0b\u7684\u819c\u5c42\u5e94\u529b\u3002\u5ba2\u6237\u56fe\u7eb8\u5199\u7684\u662f <5 nm\/cm\uff0c\u4f46\u6ca1\u6709\u8bf4\u660e\u6d4b\u91cf\u53e3\u5f84\u3001\u6d4b\u91cf\u6ce2\u957f\u4e0e\u5224\u5b9a\u65b9\u5f0f\u3002\u95ee\u9898\u5728\u7b2c\u4e8c\u6279\u6837\u54c1\u4e0a\u66b4\u9732\u51fa\u6765\uff1a\u5382\u5bb6\u6309\u5168\u53e3\u5f84\u62bd\u68c0\u3001\u51fa\u5177\u6279\u91cf\u5408\u683c\u62a5\u544a\uff1b\u5ba2\u6237\u6309 90% \u901a\u5149\u5b54\u5f84\u5185\u7684\u6700\u5927\u503c\u590d\u6d4b\uff0c\u4e24\u8fb9\u6570\u636e\u5bf9\u4e0d\u4e0a\uff0c\u4e00\u5ea6\u4e92\u76f8\u8d28\u7591\u3002\u6211\u4eec\u6ca1\u6709\u628a\u8d23\u4efb\u63a8\u7ed9\u4efb\u4f55\u4e00\u65b9\uff0c\u800c\u662f\u63d0\u8bae\u628a\u5224\u5b9a\u6761\u4ef6\u5199\u8fdb\u6280\u672f\u534f\u8bae\uff1a\u4ee5 Senarmont \u6cd5\u5728 633nm \u4e0b\u6d4b\u91cf\uff0c\u53d6\u6709\u6548\u901a\u5149\u5b54\u5f84 \u03c620mm \u5185\u7684\u6700\u5927\u5ef6\u8fdf\u91cf\u4f5c\u4e3a\u5224\u5b9a\u503c\uff1b\u5382\u5bb6\u987b\u63d0\u4f9b\u9010\u7247\u5b9e\u6d4b\u6570\u636e\u800c\u975e\u6279\u91cf\u62a5\u544a\uff1b\u5185\u90e8\u52a0\u4e25\u63a7\u5236\u81f3 \u22642 nm\/cm\uff0c\u4e3a\u5ba2\u6237\u4fa7\u590d\u6d4b\u7559\u51fa\u4f59\u91cf\u3002<\/strong><\/p>\r\n

\u7ed3\u679c\uff1a<\/strong>\u8fd9\u6761\u300c\u6d4b\u91cf\u53e3\u5f84\u5171\u8bc6\u300d\u6d88\u9664\u4e86\u6570\u636e\u5206\u6b67\uff0c\u4e5f\u88ab\u53cc\u65b9\u6cbf\u7528\u5230\u4e86\u540e\u7eed\u8ba2\u5355\u3002\u6280\u672f\u4e89\u8bae\u7684\u672c\u8d28\uff0c\u5f80\u5f80\u662f\u5b9a\u4e49\u4e0d\u4e00\u81f4\uff0c\u800c\u4e0d\u662f\u8d28\u91cf\u4e0d\u5408\u683c\u3002<\/p>\r\n\r\n

\u6311\u6218\u4e09\uff1aLD-A \u7b49\u7ea7\u4e0e\u4ea4\u671f\u7684\u6b63\u9762\u5bf9\u649e<\/h3>\r\n

\u6fc0\u5149\u8010\u4e45\u6027\u4e0d\u662f\u9760\u53c2\u6570\u8868\u5c31\u80fd\u627f\u8bfa\u7684\u6307\u6807\u3002\u5b83\u53d6\u51b3\u4e8e\u6676\u4f53\u5185\u90e8\u7684\u5305\u88f9\u4f53\u4e0e\u6c14\u6ce1\u5bc6\u5ea6\u3001\u4f4d\u9519\u5206\u5e03\uff0c\u53d6\u51b3\u4e8e\u539f\u6599\u7eaf\u5ea6\u4e0e\u9000\u706b\u5de5\u827a\uff0c\u4e5f\u53d6\u51b3\u4e8e\u5382\u5bb6\u613f\u610f\u4ece\u54ea\u4e2a\u6279\u6b21\u91cc\u6311\u6599\u3002LD-A \u662f\u5382\u5bb6\u5206\u7ea7\u4f53\u7cfb\u4e2d\u7684\u9ad8\u7b49\u7ea7\uff0c\u610f\u5473\u7740\u66f4\u957f\u7684\u751f\u957f\u4e0e\u9000\u706b\u5468\u671f\u3001\u66f4\u4f4e\u7684\u51fa\u6750\u7387\u3002\u4e0e\u6b64\u540c\u65f6\uff0c\u5ba2\u6237\u7684\u6837\u673a\u88c5\u914d\u8282\u70b9\u5df2\u7ecf\u6392\u5b9a\uff0c\u7b49\u4e0d\u8d77\u4e00\u4e2a\u5b8c\u6574\u7684\u957f\u5468\u671f\u3002\u6211\u4eec\u628a\u65b9\u6848\u62c6\u6210\u4e24\u6bb5\uff1a\u4e00\u65b9\u9762\u4e0e\u5382\u5bb6\u9501\u5b9a LD-A \u4e13\u7528\u6599\u53f7\u4e0e\u4f18\u5148\u6392\u4ea7\u6863\u671f\uff0c\u628a\u6676\u4f53\u751f\u957f\u4e0e\u9000\u706b\u63d0\u524d\u5230\u5408\u540c\u7b7e\u7f72\u524d\u542f\u52a8\uff0c\u4ee5\u6846\u67b6\u8ba2\u5355\u9501\u5b9a\u4ea7\u80fd\uff1b\u53e6\u4e00\u65b9\u9762\u4e0e\u5ba2\u6237\u534f\u5546\u5206\u6279\u4ea4\u4ed8\u2014\u2014\u9996\u6279 4 \u7247\u4f18\u5148\u6ee1\u8db3\u6837\u673a\u5149\u8def\u88c5\u914d\u4e0e\u521d\u6b65\u6d4b\u8bd5\uff0c\u4f59\u4e0b 8 \u7247\u6309\u539f\u5b9a\u8282\u70b9\u8865\u9f50\u3002<\/strong><\/p>\r\n

\u7ed3\u679c\uff1a<\/strong>\u5206\u6279\u65b9\u6848\u8ba9\u5ba2\u6237\u7684\u88c5\u914d\u8ba1\u5212\u6ca1\u6709\u505c\u6446\uff0c\u4e5f\u8ba9\u5382\u5bb6\u4e0d\u5fc5\u4e3a\u8d76\u5de5\u727a\u7272\u9000\u706b\u65f6\u95f4\u2014\u2014\u8fd9\u662f\u6574\u4e2a\u9879\u76ee\u91cc\uff0c\u552f\u4e00\u4e00\u4e2a\u8ba9\u4e09\u65b9\u90fd\u4e0d\u5403\u4e8f\u7684\u89e3\u3002<\/p>\r\n\r\n

\u56db\u3001\u4ea4\u4ed8\u8282\u594f\uff1a\u5341\u5468\uff0c\u56db\u4e2a\u8282\u70b9<\/h2>\r\n

\u7b2c 0 \u5468\uff0c\u9700\u6c42\u6f84\u6e05\uff1a\u56fe\u7eb8\u8bc4\u5ba1\uff0c\u8f93\u51fa 11 \u9879\u5f85\u786e\u8ba4\u53c2\u6570\u4e0e\u516c\u5dee\u51b2\u7a81\u6e05\u5355\uff1b\u7b2c 1\u20132 \u5468\uff0c\u56fe\u7eb8\u4f1a\u7b7e\uff1a\u4e24\u7248\u56fe\u7eb8\u6539\u7248\uff0c\u516c\u5dee\u5206\u914d\u4e0e\u6d4b\u91cf\u53e3\u5f84\u5199\u5165\u6280\u672f\u534f\u8bae\uff1b\u7b2c 3\u20138 \u5468\uff0c\u751f\u957f\u4e0e\u52a0\u5de5\uff1a\u4e13\u7528\u6279\u6b21\u751f\u957f\u3001\u957f\u65f6\u9000\u706b\u3001\u5207\u5272\u7814\u78e8\u629b\u5149\u3001193nm \u9540\u819c\uff1b\u7b2c 9\u201310 \u5468\uff0c\u68c0\u6d4b\u4e0e\u4ea4\u4ed8\uff1a\u9010\u7247\u53cc\u6298\u5c04\u4e0e\u9762\u5f62\u590d\u6d4b\uff0c\u6fc0\u5149\u8f90\u7167\u62bd\u68c0\uff0c\u6d01\u51c0\u5305\u88c5\u53d1\u8fd0\u3002<\/p>\r\n

\u8fd9\u5341\u5468\u91cc\uff0c\u6211\u4eec\u4e0e\u5ba2\u6237\u5b8c\u6210\u4e86\u4e94\u8f6e\u6280\u672f\u6f84\u6e05\u3001\u4e24\u6b21\u56fe\u7eb8\u6539\u7248\uff1b\u4e0e\u5382\u5bb6\u5f80\u8fd4\u5341\u4f59\u8f6e\u6280\u672f\u90ae\u4ef6\uff0c\u5e76\u7ec4\u7ec7\u4e86\u4e09\u6b21\u4e09\u65b9\u89c6\u9891\u4f1a\u8bae\u3002\u5bc6\u5ea6\u6700\u9ad8\u7684\u4e00\u5468\uff0c\u540c\u4e00\u4efd\u516c\u5dee\u8868\u5728\u5ba2\u6237\u5149\u673a\u3001\u5ba2\u6237\u91c7\u8d2d\u3001\u5382\u5bb6\u5de5\u827a\u4e09\u65b9\u4e4b\u95f4\u6765\u56de\u4fee\u6539\u4e86\u56db\u7248\u3002\u6c9f\u901a\u7684\u6210\u672c\uff0c\u6c38\u8fdc\u4f4e\u4e8e\u8fd4\u5de5\u7684\u6210\u672c<\/strong>\u2014\u2014\u8fd9\u53e5\u8bdd\u5728\u8fd9\u4e2a\u9879\u76ee\u91cc\u5f97\u5230\u4e86\u5b8c\u6574\u7684\u9a8c\u8bc1\u3002<\/p>\r\n\r\n

\u4e94\u3001\u4ea4\u4ed8\u4e0e\u9a8c\u8bc1\uff1a\u8ba9\u6bcf\u4e00\u7247\u90fd\u6709\u6570\u636e<\/h2>\r\n

\u5341\u5468\u540e\uff0c\u5341\u4e8c\u7247\u6676\u4f53\u7247\u5b8c\u6210\u4ea4\u4ed8\u3002\u968f\u8d27\u63d0\u4ea4\u7684\u4e0d\u662f\u4e00\u5f20\u5408\u683c\u8bc1\uff0c\u800c\u662f\u4e00\u5957\u9010\u7247\u7684\u68c0\u6d4b\u6570\u636e\u5305\uff1a<\/p>\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n
\u68c0\u6d4b\u9879<\/th>\r\n\u5b9e\u6d4b\u7ed3\u679c<\/th>\r\n<\/tr>\r\n<\/thead>\r\n
\u5916\u5f62\u5c3a\u5bf8<\/td>\r\n\u5916\u5f84 \u03c625.4 +0.012\uff5e+0.026mm\uff1b\u539a\u5ea6 3.00\u00b10.008mm\uff0c\u5168\u90e8\u843d\u5728\u6536\u7d27\u540e\u7684\u516c\u5dee\u5e26\u5185<\/td>\r\n<\/tr>\r\n
193nm \u900f\u8fc7\u7387<\/td>\r\n\u5185\u90e8\u900f\u8fc7\u7387 \u226599.6%\/cm\uff1b\u9540\u819c\u540e\u5355\u9762\u5269\u4f59\u53cd\u5c04\u7387 \u22640.4%<\/td>\r\n<\/tr>\r\n
\u5e94\u529b\u53cc\u6298\u5c04<\/td>\r\n\u03c620mm \u901a\u5149\u533a\u6700\u5927\u5ef6\u8fdf\u91cf \u22641.6 nm\/cm<\/td>\r\n<\/tr>\r\n
\u6298\u5c04\u7387\u5747\u5300\u6027<\/td>\r\n\u0394n \u22640.8\u00d710\u207b\u2076<\/td>\r\n<\/tr>\r\n
\u9762\u5f62\u4e0e\u8868\u9762<\/td>\r\nPV \u2264\u03bb\/12\uff0c\u4e0d\u89c4\u5219\u5ea6 \u2264\u03bb\/25 @633nm\uff1b\u8868\u9762\u8d28\u91cf 10-5\uff1bRq \u22644 \u00c5<\/td>\r\n<\/tr>\r\n
\u6fc0\u5149\u8010\u4e45\u6027<\/td>\r\n193nm ArF \u6fc0\u5149 200 mJ\/cm\u00b2\u300110\u2076 \u8109\u51b2\uff0c\u65e0\u635f\u4f24\u3001\u65e0\u900f\u8fc7\u7387\u8870\u51cf<\/td>\r\n<\/tr>\r\n
\u8fb9\u7f18\u4e0e\u5305\u88c5<\/td>\r\n\u5168\u7247\u5d29\u8fb9 \u22640.03mm\uff1bClass 100 \u73af\u5883\u53cc\u5c42\u771f\u7a7a\u6d01\u51c0\u5305\u88c5<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n

\u8868 2\u3000\u4ea4\u4ed8\u6279\u6b21\u5b9e\u6d4b\u6570\u636e\uff08\u8282\u9009\uff0c\u5df2\u83b7\u5ba2\u6237\u540c\u610f\u5f15\u7528\uff09\u3002<\/p>\r\n

<\/p>"],"themepark_post_bcolor":["#f5f5f5"],"themepark_post_width":["1022px"],"themepark_post_img_po":["left"],"themepark_post_main_p":["100"],"themepark_auto_metas":["a:1:{s:6:\"ector0\";s:13468:\"

2026 \u5e74\u4e0a\u534a\u5e74\uff0c\u4e00\u5bb6\u4e13\u6ce8\u4e8e\u6676\u5706\u5f62\u8c8c\u6d4b\u91cf\u3001\u5916\u5ef6\u5c42\u819c\u539a\u91cf\u6d4b\u4e0e\u5149\u8c31\u692d\u504f\u4eea\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u4f01\u4e1a\u627e\u5230\u6211\u4eec\uff0c\u5e0c\u671b\u91c7\u8d2d\u4e00\u6279 193nm \u6ce2\u6bb5\u7684\u6c1f\u5316\u9499\uff08CaF\u2082\uff09\u6676\u4f53\u7247\u3002\u9700\u6c42\u6700\u521d\u53ea\u6709\u4e00\u53e5\u8bdd\uff1a\u5c3a\u5bf8\u6309\u56fe\u7eb8\u3001\u6b63\u516c\u5dee\u3001\u6fc0\u5149\u8010\u4e45\u8981\u597d\u3002\u800c\u5728\u6df1\u7d2b\u5916\u5149\u5b66\u91cc\uff0c\u4e00\u53e5\u6a21\u7cca\u7684\u9700\u6c42\uff0c\u5f80\u5f80\u610f\u5473\u7740\u540e\u9762\u8fd8\u6709\u5341\u51e0\u8f6e\u6280\u672f\u5bf9\u8bdd\u3002\u8fd9\u4e2a\u9879\u76ee\u6700\u7ec8\u5728\u5408\u540c\u4ea4\u671f\u5185\u5b8c\u6210\u4ea4\u4ed8\uff0c\u9760\u7684\u4e0d\u662f\u8fd0\u6c14\uff0c\u800c\u662f\u628a\u6bcf\u4e00\u4e2a\u542b\u7cca\u7684\u8bcd\uff0c\u53d8\u6210\u53ef\u4ee5\u6d4b\u91cf\u3001\u53ef\u4ee5\u9a8c\u6536\u7684\u6570\u5b57\u3002<\/p>\r\n\r\n

\u4e00\u3001\u9879\u76ee\u80cc\u666f\uff1a\u4e3a\u4ec0\u4e48\u662f CaF\u2082\uff0c\u4e3a\u4ec0\u4e48\u662f 193nm<\/h2>\r\n

\u5ba2\u6237\u7684\u8bbe\u5907\u5de5\u4f5c\u5728\u6df1\u7d2b\u5916\u6ce2\u6bb5\u3002\u6676\u5706\u5f62\u8c8c\u6d4b\u91cf\u4f9d\u8d56\u9ad8\u7cbe\u5ea6\u7684\u5e72\u6d89\u4e0e\u6210\u50cf\u5149\u8def\uff0c\u5916\u5ef6\u5c42\u819c\u539a\u91cf\u6d4b\u9700\u8981\u5728\u6781\u77ed\u6ce2\u957f\u4e0b\u5206\u8fa8\u7eb3\u7c73\u7ea7\u7684\u539a\u5ea6\u5dee\u5f02\uff0c\u5149\u8c31\u692d\u504f\u4eea\u5219\u8981\u901a\u8fc7\u504f\u632f\u6001\u7684\u53d8\u5316\u53cd\u6f14\u8584\u819c\u7684\u6298\u5c04\u7387\u4e0e\u539a\u5ea6\u3002\u4e09\u6761\u4ea7\u54c1\u7ebf\u6307\u5411\u540c\u4e00\u4e2a\u6280\u672f\u4e8b\u5b9e\uff1a\u6ce2\u957f\u8d8a\u77ed\uff0c\u7075\u654f\u5ea6\u8d8a\u9ad8\uff1b\u800c\u6ce2\u957f\u4e00\u65e6\u538b\u5230 193nm\uff0c\u53ef\u7528\u7684\u900f\u5149\u6750\u6599\u5c31\u53ea\u5269\u4e0b\u5f88\u5c11\u51e0\u79cd\u3002<\/strong><\/p>\r\n

\u7194\u77f3\u82f1\u5728\u8fd9\u4e2a\u6ce2\u6bb5\u4f1a\u51fa\u73b0\u81f4\u5bc6\u5316\u4e0e\u8272\u5fc3\u5438\u6536\uff0c\u957f\u671f\u8f90\u7167\u4e0b\u900f\u8fc7\u7387\u8870\u51cf\u660e\u663e\uff0c\u8fd8\u4f1a\u5e26\u6765\u6ce2\u524d\u7578\u53d8\uff1b\u6c1f\u5316\u9499\u5355\u6676\u5219\u5728 193nm \u5904\u540c\u65f6\u5177\u5907\u9ad8\u900f\u8fc7\u7387\u3001\u4f4e\u672c\u5f81\u53cc\u6298\u5c04\u4e0e\u826f\u597d\u7684\u6fc0\u5149\u8010\u53d7\u6027\uff0c\u662f\u8fd9\u4e00\u6ce2\u6bb5\u7a97\u53e3\u7247\u3001\u900f\u955c\u4e0e\u504f\u632f\u5143\u4ef6\u7684\u9996\u9009\u6750\u6599\u3002\u5ba2\u6237\u9009\u5b83\uff0c\u4e0d\u662f\u56e0\u4e3a\u5b83\u4fbf\u5b9c\uff0c\u800c\u662f\u56e0\u4e3a\u6ca1\u6709\u66f4\u597d\u7684\u66ff\u4ee3\u3002<\/p>\r\n

\u8fd9\u4e5f\u51b3\u5b9a\u4e86\u6211\u4eec\u5bf9\u8fd9\u4ef6\u4e8b\u7684\u57fa\u672c\u5224\u65ad\uff1a\u8fd9\u4e0d\u662f\u4e00\u6b21\u6807\u51c6\u54c1\u91c7\u8d2d\uff0c\u800c\u662f\u4e00\u6b21\u9700\u8981\u4e09\u65b9\u5171\u540c\u5b9a\u4e49\u6307\u6807\u7684\u5149\u5b66\u5b9a\u5236\u3002<\/strong>\u5ba2\u6237\u5b9a\u4e49\u6574\u673a\u9700\u6c42\uff0c\u5382\u5bb6\u5b9a\u4e49\u5de5\u827a\u8fb9\u754c\uff0c\u6211\u4eec\u7ad9\u5728\u4e2d\u95f4\uff0c\u8d1f\u8d23\u628a\u4e24\u8005\u5bf9\u9f50\u3002<\/p>\r\n\r\n

\u4e8c\u3001\u9700\u6c42\u62c6\u89e3\uff1a\u628a\u300c\u6309\u56fe\u7eb8\u300d\u7ffb\u8bd1\u6210\u53ef\u9a8c\u6536\u7684\u53c2\u6570<\/h2>\r\n

\u5ba2\u6237\u63d0\u4f9b\u7684\u56fe\u7eb8\u6807\u6ce8\u4e86\u57fa\u672c\u5916\u5f62\u4e0e\u90e8\u5206\u5149\u5b66\u6307\u6807\uff0c\u4f46\u4ecd\u6709\u591a\u4e2a\u5173\u952e\u9879\u5904\u4e8e\u5f00\u53e3\u72b6\u6001\u3002\u7b2c\u4e00\u6b21\u6280\u672f\u8bc4\u5ba1\uff0c\u6211\u4eec\u5217\u51fa\u4e86\u5341\u4e00\u9879\u9700\u8981\u6f84\u6e05\u7684\u6761\u76ee\uff0c\u5176\u4e2d\u4e03\u9879\u76f4\u63a5\u5f71\u54cd\u62a5\u4ef7\u3001\u826f\u7387\u4e0e\u4ea4\u671f\uff0c\u5fc5\u987b\u9010\u4e00\u843d\u5b9a\uff1a<\/p>\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n
\u53c2\u6570\u9879<\/th>\r\n\u5ba2\u6237\u521d\u59cb\u8868\u8ff0<\/th>\r\n\u6f84\u6e05\u540e\u7684\u6280\u672f\u8981\u6c42<\/th>\r\n<\/tr>\r\n<\/thead>\r\n
\u5916\u5f62\u5c3a\u5bf8<\/td>\r\n\u6309\u56fe\u7eb8\uff0c\u6b63\u516c\u5dee<\/td>\r\n\u03c625.4mm\uff0c\u5916\u5f84 +0.00\/+0.03mm\uff1b\u539a\u5ea6\u7531\u6b63\u516c\u5dee\u8c03\u6574\u4e3a 3.00\u00b10.02mm<\/td>\r\n<\/tr>\r\n
\u6750\u6599\u4e0e\u6ce2\u6bb5<\/td>\r\n193nm \u7528 CaF\u2082<\/td>\r\n193nm \u5149\u523b\u7ea7\u5355\u6676\u6c1f\u5316\u9499\uff0c\u5185\u90e8\u900f\u8fc7\u7387 \u226599.5%\/cm<\/td>\r\n<\/tr>\r\n
\u6fc0\u5149\u8010\u4e45\u6027<\/td>\r\n\u300c\u8981\u597d\u300d<\/td>\r\n\u5bf9\u5e94\u5382\u5bb6 LD-A \u7b49\u7ea7\uff1a193nm\u3001200 mJ\/cm\u00b2\u300110\u2076 \u8109\u51b2\u8f90\u7167\u65e0\u635f\u4f24<\/td>\r\n<\/tr>\r\n
\u5e94\u529b\u53cc\u6298\u5c04<\/td>\r\n<5 nm\/cm<\/td>\r\n\u6709\u6548\u901a\u5149\u5b54\u5f84 \u03c620mm \u5185\u6700\u5927\u5ef6\u8fdf\u91cf \u22642 nm\/cm\uff0c\u9010\u7247\u5b9e\u6d4b\u3001\u968f\u7247\u4ea4\u4ed8<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n
<\/td>\r\n<\/td>\r\n<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n

\u8fd9\u91cc\u6709\u4e00\u4e2a\u5bb9\u6613\u88ab\u5ffd\u7565\u7684\u7ec6\u8282\uff1a\u5ba2\u6237\u8bf4\u300c\u6b63\u516c\u5dee\u300d\uff0c\u8bf4\u7684\u662f\u88c5\u914d\u610f\u56fe\uff0c\u4e0d\u662f\u516c\u5dee\u672c\u8eab\u3002\u6df1\u7d2b\u5916\u5149\u8def\u91cc\uff0c\u6676\u4f53\u7247\u8981\u538b\u5165\u955c\u5ea7\u5b9a\u4f4d\uff0c\u5916\u5f84\u504f\u5c0f\u4f1a\u677e\u52a8\uff0c\u51e0\u5341\u5fae\u7c73\u7684\u4f4d\u79fb\u5c31\u8db3\u4ee5\u9020\u6210\u504f\u5fc3\u4e0e\u50cf\u8d28\u4e0b\u964d\u3002\u6240\u4ee5\u300c\u6b63\u516c\u5dee\u300d\u8fd9\u56db\u4e2a\u5b57\u80cc\u540e\uff0c\u5176\u5b9e\u662f\u4e00\u6761\u5b8c\u6574\u7684\u88c5\u914d\u94fe\u7ea6\u675f\u3002<\/p>\r\n\r\n

\u4e09\u3001\u4e09\u91cd\u6311\u6218\uff1a\u771f\u6b63\u7684\u56f0\u96be\u90fd\u4e0d\u5728\u56fe\u7eb8\u4e0a<\/h2>\r\n

\u6311\u6218\u4e00\uff1a\u6b63\u516c\u5dee\u7684\u8fb9\u754c\u5728\u54ea\u91cc<\/h3>\r\n

\u542c\u5230\u300c\u6240\u6709\u5c3a\u5bf8\u90fd\u8981\u6b63\u516c\u5dee\u300d\u65f6\uff0c\u6211\u4eec\u505a\u7684\u7b2c\u4e00\u4ef6\u4e8b\u4e0d\u662f\u8bb0\u5f55\uff0c\u800c\u662f\u8ffd\u95ee\uff1a\u539a\u5ea6\u4e5f\u8981\u6b63\u516c\u5dee\u5417\uff1f\u7b54\u6848\u662f\u4e0d\u80fd\u3002\u5982\u679c\u539a\u5ea6\u540c\u6837\u8d70\u5355\u5411\u6b63\u516c\u5dee\uff0c\u591a\u7247\u53e0\u52a0\u540e\u5149\u7a0b\u4f1a\u6574\u4f53\u504f\u79fb\uff0c\u692d\u504f\u4eea\u7684\u7126\u9762\u4e0e\u53c2\u8003\u81c2\u90fd\u9700\u91cd\u65b0\u6807\u5b9a\uff1b\u66f4\u9ebb\u70e6\u7684\u662f\uff0c\u539a\u5ea6\u504f\u5dee\u4f1a\u968f\u6279\u6b21\u6f02\u79fb\uff0c\u5ba2\u6237\u6bcf\u6b21\u6362\u7247\u90fd\u8981\u91cd\u65b0\u6821\u51c6\u3002\u6211\u4eec\u5411\u5ba2\u6237\u63d0\u4ea4\u4e86\u4e00\u4efd\u516c\u5dee\u5206\u914d\u5efa\u8bae\uff1a\u5916\u5f84\u3001\u5b9a\u4f4d\u53f0\u9636\u7b49\u914d\u5408\u5c3a\u5bf8\u4fdd\u7559\u5355\u5411\u6b63\u516c\u5dee\uff1b\u539a\u5ea6\u6539\u4e3a\u5bf9\u79f0\u516c\u5dee\u5e76\u6536\u7d27\u81f3 \u00b10.02mm\uff1b\u5269\u4f59\u504f\u5dee\u7531\u88c5\u914d\u7aef\u7684\u8c03\u8282\u57ab\u5708\u5438\u6536\u3002<\/strong><\/p>\r\n

\u7ed3\u679c\uff1a<\/strong>\u5ba2\u6237\u5149\u673a\u5de5\u7a0b\u5e08\u590d\u6838\u540e\u63a5\u53d7\u4e86\u8fd9\u4e00\u65b9\u6848\u3002\u8fd9\u662f\u9879\u76ee\u91cc\u7b2c\u4e00\u6b21\u300c\u6539\u9700\u6c42\u300d\uff0c\u4e5f\u662f\u6700\u5173\u952e\u7684\u4e00\u6b21\u2014\u2014\u5b83\u628a\u4e00\u4efd\u53ef\u80fd\u53cd\u590d\u8fd4\u5de5\u7684\u8ba2\u5355\uff0c\u53d8\u6210\u4e86\u4e00\u6b21\u53ef\u9884\u6d4b\u7684\u4ea4\u4ed8\u3002<\/p>\r\n\r\n

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